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1. (WO2014193954) MULTI-LAYER COMPOSITE BACKPLATE FOR MICROMECHANICAL MICROPHONE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/193954    International Application No.:    PCT/US2014/039793
Publication Date: 04.12.2014 International Filing Date: 28.05.2014
IPC:
H04R 19/00 (2006.01)
Applicants: ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart (DE)
Inventors: ZINN, John, W.; (US).
DIAMOND, Brett, Mathew; (US)
Agent: EINERSON, Jay; (US)
Priority Data:
61/827,982 28.05.2013 US
Title (EN) MULTI-LAYER COMPOSITE BACKPLATE FOR MICROMECHANICAL MICROPHONE
(FR) PLAQUE ARRIÈRE COMPOSITE MULTICOUCHE POUR MICROPHONE MICROMÉCANIQUE
Abstract: front page image
(EN)A MEMS device. The device includes a membrane, and a reinforced backplate having a plurality of openings. The reinforced backplate include a first layer, and a second layer coupled to the first layer.
(FR)L'invention concerne un dispositif MEMS. Ce dispositif comprend une membrane et une plaque arrière renforcée ayant une pluralité d'ouvertures. La plaque arrière renforcée comprend une première couche et une seconde couche accouplée à la première couche.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)