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1. (WO2014193867) ALUMINIUM DOPANT COMPOSITIONS, SUB-ATMOSPHERIC STORAGE AND DELIVERY PACKAGE CONTAINING SUCH COMPOSITIONS, AND METHOD OF STORING AND DELIVERING SUCH COMPOSITIONS

Pub. No.:    WO/2014/193867    International Application No.:    PCT/US2014/039641
Publication Date: Fri Dec 05 00:59:59 CET 2014 International Filing Date: Thu May 29 01:59:59 CEST 2014
IPC: H01J 37/08
H01J 37/317
Applicants: PRAXAIR TECHNOLOGY, INC.
Inventors: SINHA, Ashwini, K.
BROWN, Lloyd, A.
Title: ALUMINIUM DOPANT COMPOSITIONS, SUB-ATMOSPHERIC STORAGE AND DELIVERY PACKAGE CONTAINING SUCH COMPOSITIONS, AND METHOD OF STORING AND DELIVERING SUCH COMPOSITIONS
Abstract:
A method and system for using aluminum dopant compositions is provided. A composition of the aluminum dopant compositions is selected, represented by the formula AlxRyLz, where R is a methyl group, L is CI, F, I or Br, and x is either 1 or 2, whereby if x = 1, then Y = 1 or 2, and if x = 2 then y = 2x - 4, and z = 3x-y for x =1 or 2. The composition has sufficient vapor pressure and minimal carbon content, thereby enabling ease of delivery to an ion implant process and substantial reduction of carbon deposition during Al ion implantation. The source material is preferably stored and delivered from a sub-atmospheric storage and delivery device to enhance safety and reliability during the Al ion implantation process.