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1. (WO2014193493) POLYMER FOAM-BASED PIEZOELECTRIC MATERIALS AND METHOD OF MANUFACTURE

Pub. No.:    WO/2014/193493    International Application No.:    PCT/US2014/016717
Publication Date: Fri Dec 05 00:59:59 CET 2014 International Filing Date: Tue Feb 18 00:59:59 CET 2014
IPC: H01L 41/193
H01L 41/083
Applicants: THE FLORIDA STATE UNIVERSITY RESEARCH FOUNDATION, INC.
ZENG, Changchun
LI, Yan
Inventors: ZENG, Changchun
LI, Yan
Title: POLYMER FOAM-BASED PIEZOELECTRIC MATERIALS AND METHOD OF MANUFACTURE
Abstract:
This invention relates to thermally stable piezoelectric polymer foams (ferroelectrets) with high piezoelectric activity for sensing and actuation and a method of fabricating such foams. In embodiments, a carbon dioxide bonding process is used to couple layers of an assembly, wherein the assembly is formed by arranging patterned layers and metallized top and bottom layers.