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Machine translation
1. (WO2014193138) SUBSTRATE SUPPORT DEVICE AND SUBSTRATE TREATMENT DEVICE COMPRISING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/193138    International Application No.:    PCT/KR2014/004707
Publication Date: 04.12.2014 International Filing Date: 27.05.2014
IPC:
H01L 21/683 (2006.01), F16C 29/02 (2006.01)
Applicants: JUSUNG ENGINEERING CO., LTD. [KR/KR]; 240, Opo-ro, Opo-eup Gwangju-si Gyeonggi-do 464-892 (KR)
Inventors: CHOI, Jong Sung; (KR).
KWON, Bong Sung; (KR).
RYU, Ji Hwan; (KR).
LEE, Myung Jin; (KR).
JUNG, Suk Chul; (KR)
Agent: ASTRAN INT'L IP GROUP; (ShinSung Building, Yeoksam-dong) 5th Floor, 233, Yeoksam-ro Gangnam-gu, Seoul 135-514 (KR)
Priority Data:
10-2013-0060676 28.05.2013 KR
Title (EN) SUBSTRATE SUPPORT DEVICE AND SUBSTRATE TREATMENT DEVICE COMPRISING SAME
(FR) DISPOSITIF DE SUPPORT DE SUBSTRAT ET DISPOSITIF DE TRAITEMENT DE SUBSTRAT LE COMPRENANT
(KO) 기판 지지 장치 및 이를 포함하는 기판 처리 장치
Abstract: front page image
(EN)The present invention provides a substrate support device capable of preventing damage to a plurality of lift pins for supporting a substrate, and a substrate treatment device comprising the same. The substrate support device according to the present invention comprises: a suscepter on which a substrate is placed; a lift pin provided so as to vertically pass through the suscepter and for supporting the substrate; and a bushing provided to the suscepter so as to allow a lift pin to be inserted therein, wherein the bushing comprises a self-lubricating material, thereby preventing damage to the lift pin.
(FR)La présente invention porte sur un dispositif de support de substrat apte à empêcher un endommagement sur une pluralité de broches d’élévation pour porter un substrat, et sur un dispositif de traitement de substrat comprenant ce dernier. Le dispositif de support de substrat selon la présente invention comprend : un suscepteur sur lequel un substrat est placé ; une broche d’élévation agencée afin de traverser verticalement le suscepteur et pour porter le substrat ; et une douille agencée sur le suscepteur afin de permettre à une broche d’élévation d’être introduite en son sein, la douille comprenant un matériau auto-lubrifiant, empêchant ainsi un endommagement sur la broche d’élévation.
(KO)본 발명은 기판을 지지하는 복수의 리프트 핀의 파손을 방지할 수 있는 기판 지지 장치 및 이를 포함하는 기판 처리 장치를 제공하는 것으로, 본 발명에 따른 기판 지지 장치는 기판이 안착되는 서셉터; 상기 서셉터를 수직 관통하도록 설치되어 상기 기판을 지지하는 리프트 핀; 및 상기 리프트 핀이 삽입되도록 상기 서셉터에 설치된 부싱을 포함하며, 상기 부싱은 자기 윤활성 재질을 포함하여 이루어져 상기 리프트 핀의 손상을 방지한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)