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|1. (WO2014192999) DEFECT INSPECTION SYSTEM FOR INSPECTING OBJECT HAVING IRREGULAR PATTERNS|
|Applicants:||SEMISYSCO CO., LTD
|Title:||DEFECT INSPECTION SYSTEM FOR INSPECTING OBJECT HAVING IRREGULAR PATTERNS|
Disclosed is a system for inspecting an object having irregular patterns, for example, for inspecting a waviness defect in a transparent film. The defect inspection system for inspecting a waviness defect in an object having a non-uniform thickness comprises a light source for outputting planar light and a light conversion unit for converting the planar light outputted from the light source into point light, wherein the light outputted from the light source is incident on the object through the light conversion unit.