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1. (WO2014192257) SPECTRAL MICROSCOPY DEVICE

Pub. No.:    WO/2014/192257    International Application No.:    PCT/JP2014/002674
Publication Date: Fri Dec 05 00:59:59 CET 2014 International Filing Date: Thu May 22 01:59:59 CEST 2014
IPC: G01N 21/27
G01N 21/65
Applicants: CANON KABUSHIKI KAISHA
Inventors: KYOGAKU, Masafumi
Title: SPECTRAL MICROSCOPY DEVICE
Abstract:
A spectral microscopy device includes a spectral detecting unit including a light source that is capable of controlling an output wavelength, a microscope section that is provided with an observation area that is illuminated with light output from the light source, and a signal detector that detects light from the observation area as spectral data; a moving unit configured to move the observation area; and a controller that performs a control operation to allow the spectral detecting unit and the moving unit to move in response to each other. The spectral microscopy device is controlled so that switching between different measurement conditions based on the number of measurement points is performed at an observation area movement time in which the observation area is moved by the moving unit and measurement is performed and at a observation area movement stoppage time in which the observation area is fixed and measurement is performed, and spectral data is detected.