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1. (WO2014192242) CAPACITIVE PHYSICAL QUANTITY SENSOR
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2014/192242 International Application No.: PCT/JP2014/002594
Publication Date: 04.12.2014 International Filing Date: 16.05.2014
IPC:
G01P 15/125 (2006.01) ,H01L 29/84 (2006.01)
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
125
by capacitive pick-up
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
84
controllable by variation of applied mechanical force, e.g. of pressure
Applicants:
株式会社デンソー DENSO CORPORATION [JP/JP]; 愛知県刈谷市昭和町1丁目1番地 1-1, Showa-cho, Kariya-city, Aichi 4488661, JP
Inventors:
杉本 圭正 SUGIMOTO, Kiyomasa; JP
酒井 峰一 SAKAI, Minekazu; JP
Agent:
金 順姫 KIN, Junhi; 愛知県名古屋市中区錦2丁目13番19号 瀧定ビル6階 6th Floor, Takisada Bldg., 2-13-19, Nishiki, Naka-ku, Nagoya-city, Aichi 4600003, JP
Priority Data:
2013-11530631.05.2013JP
Title (EN) CAPACITIVE PHYSICAL QUANTITY SENSOR
(FR) CAPTEUR CAPACITIF DE QUANTITÉ PHYSIQUE
(JA) 容量式物理量センサ
Abstract:
(EN) A capacitive physical quantity sensor is provided with a first substrate (14, 15), a movable electrode (24), a fixed electrode (31, 41), and a second substrate (11, 201). The portion of the second substrate opposing the movable electrode has an auxiliary electrode (71a, 72a) disposed thereon having an area of opposition to the movable electrode that changes by different amounts when the movable electrode moves in one direction in a prescribed direction and when the movable electrode moves in the opposite direction from the one direction, and the physical quantity is detected on the basis of a capacitance (Cd) corresponding to the distance between the movable electrode and the fixed electrode and a capacitance (Cs) corresponding to the opposing area between the movable electrode and the auxiliary electrode.
(FR) La présente invention concerne un capteur capacitif de quantité physique comprenant un premier substrat (14, 15), une électrode mobile (24), une électrode fixe (31, 41) et un second substrat (11, 201). Une électrode auxiliaire (71a, 72a) est disposée sur la partie du second substrat opposée à l'électrode mobile, ladite électrode auxiliaire ayant une zone d'opposition à l'électrode mobile qui change selon différentes quantités quand l'électrode mobile se déplace dans une première direction prédéterminée et quand l'électrode mobile se déplace dans la direction opposée par rapport à la première direction, et la quantité physique est détectée sur la base d'une capacité (Cd) correspondant à la distance entre l'électrode mobile et l'électrode fixe et d'une capacité (Cs) correspondant à la zone d'opposition entre l'électrode mobile et l'électrode auxiliaire.
(JA)  容量式物理量センサは、第1基板(14、15)と、可動電極(24)と、固定電極(31、41)と、第2基板(11、201)と、を備える。前記第2基板のうち前記可動電極と対向する部分には、前記可動電極が所定方向における一方向に変位した場合と前記可動電極が前記一方向と反対方向に変位した場合とで前記可動電極との対向面積の変化量が異なる補助電極(71a、72a)が配置されており、前記可動電極と前記固定電極との間隔に応じた容量(C)および前記可動電極と前記補助電極との対向面積に応じた容量(C)に基づいて前記物理量を検出する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)