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1. (WO2014191163) METHOD OF SIMULATING FORMATION OF LITHOGRAPHY FEATURES BY SELF-ASSEMBLY OF BLOCK COPOLYMERS

Pub. No.:    WO/2014/191163    International Application No.:    PCT/EP2014/059097
Publication Date: Fri Dec 05 00:59:59 CET 2014 International Filing Date: Tue May 06 01:59:59 CEST 2014
IPC: G03F 7/00
Applicants: ASML NETHERLANDS B.V.
Inventors: WUISTER, Sander
DRUZHININA, Tamara
VAN MALE, Jan
KLEIN-WOLTERINK, Joanne
AMBESI, Davide
Title: METHOD OF SIMULATING FORMATION OF LITHOGRAPHY FEATURES BY SELF-ASSEMBLY OF BLOCK COPOLYMERS
Abstract:
A method of determining an uncertainty in the position of a domain within a self- assembly block copolymer (BCP) feature. The method includes simulating a BCP feature, calculating a minimum energy position of a first domain within the simulated BCP feature, simulating the application of a potential that causes the position of the first domain to be displaced from the minimum energy position, simulating release of the potential back toward the minimum energy, recording a plurality of energies of the BCP feature during the release and recording at each of the plurality of energies a displacement of the first domain from the minimum energy position, calculating, from the recorded energies and recorded displacements, a probability distribution indicating a probability of the first domain being displaced from the minimum energy position, and, from the probability distribution, calculating an uncertainty in the position of the first domain within the BCP feature.