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Machine translation
1. (WO2014190070) FULLERENES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/190070    International Application No.:    PCT/US2014/038997
Publication Date: 27.11.2014 International Filing Date: 21.05.2014
IPC:
G03F 7/004 (2006.01), C01B 31/02 (2006.01), C07C 62/34 (2006.01), C07C 209/70 (2006.01)
Applicants: ROBINSON, Alex Philip Graaham [US/US]; (GB).
PALMER, Richard Edward [GB/GB]; (GB).
FROMMHOLD, Andreas [DE/DE]; (DE).
YANG, Dongxu [CN/GB]; (GB)
Inventors: ROBINSON, Alex Philip Graaham; (GB).
PALMER, Richard Edward; (GB).
FROMMHOLD, Andreas; (DE).
YANG, Dongxu; (GB)
Agent: SHELUNT, James G.; (US)
Priority Data:
61/826,342 22.05.2013 US
Title (EN) FULLERENES
(FR) FULLERÈNES
Abstract: front page image
(EN)The present disclosure relates to novel fullerene derivatives, positive and negative photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for high speed, fine pattern processing using, for example, ultraviolet radiation, extreme ultraviolet radiation, beyond extreme ultraviolet radiation, X-rays, electron beam and other charged particle rays.
(FR)La présente invention concerne des nouveaux dérivés de fullerène, des compositions de photorésist positive et négative préparées à partir de ces derniers et des procédés d'utilisation de ces derniers. Les dérivés, leurs compositions de photorésist et les procédés sont idéaux pour un traitement de formation de motifs minces à haute vitesse utilisant, par exemple, un rayonnement ultraviolet, un rayonnement ultraviolet extrême, un rayonnement ultraviolet au-delà des extrêmes, des rayons X, un faisceau d'électrons et d'autres rayons de particules chargées.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)