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Machine translation
1. (WO2014186547) METHOD OF MEASURING NARROW RECESSED FEATURES USING MACHINE VISION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/186547    International Application No.:    PCT/US2014/038146
Publication Date: 20.11.2014 International Filing Date: 15.05.2014
IPC:
G01B 11/14 (2006.01), G06T 7/00 (2006.01)
Applicants: ELECTRO SCIENTIFIC INDUSTRIES, INC. [US/US]; 13900 NW Science Park Drive Portland, OR 97229 (US)
Inventors: KIM, Kyung, Young; (US)
Agent: LEVINE, Michael, L.; Electro Scientific Industries, Inc 13900 NW Science Park Drive Portland, OR 97229 (US)
Priority Data:
61/824,545 17.05.2013 US
61/824,555 17.05.2013 US
Title (EN) METHOD OF MEASURING NARROW RECESSED FEATURES USING MACHINE VISION
(FR) PROCÉDÉ DE MESURE D'ÉLÉMENTS EN RETRAIT ÉTROITS À L'AIDE DE LA VISION ARTIFICIELLE
Abstract: front page image
(EN)Deep narrow gaps (20) between side walls (32 and 36) of a workpiece (26) can be measure by modules (42) that include an imager (70) and provide focused directional lighting from light sources (76) into the gaps (20). The imager (70) may employ a camera having an array of pixels along rows and columns. Gray scale captured by pixels along rows or columns parallel to a major axis (46) of the gap (20) may be analyzed to facilitate determination of spacing between the edges (34 and 38) of the gaps (20). Relative movement between the workpiece (26) and the imager (76) along the major axis (46) can also facilitate determination of spacing between the edges (34 and 38) of the gaps (20).
(FR)L'invention permet de mesurer des espaces étroits et profonds (20) entre des parois latérales (32 et 36) d'une pièce à traiter (26) au moyen de modules (42) comprenant un imageur (70) et assurant un éclairage dirigé focalisé des espaces (20) par le biais de sources de lumière (76). L'imageur (70) peut employer une caméra comportant une matrice de pixels en rangées et colonnes. Une échelle des gris capturée par des pixels le long de rangées ou de colonnes parallèles à un axe principal (46) de l'espace (20) peut être analysée afin de faciliter la détermination de l'écart entre les bords (34 et 38) des espaces (20). Le déplacement relatif entre la pièce à traiter (26) et l'imageur (70) le long de l'axe principal (46) peut également faciliter la détermination de l'écart entre les bords (34 et 38) des espaces (20).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)