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1. (WO2014186337) THERMO-COMPRESSION BONDING SYSTEM, SUBSYSTEMS, AND METHODS OF USE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/186337    International Application No.:    PCT/US2014/037800
Publication Date: 20.11.2014 International Filing Date: 13.05.2014
IPC:
H01L 21/603 (2006.01), H01L 21/02 (2006.01)
Applicants: MRSI SYSTEMS LLC [US/US]; 101 Billerica Avenue, Building 3 North Billerica, Massachusetts 01862 (US)
Inventors: CELIA, Jr., Nicholas Samuel; (US).
DEVASIA, Cyriac; (US)
Agent: CURRAN, Matthew; (US)
Priority Data:
61/822,912 13.05.2013 US
61/926,637 13.01.2014 US
61/928,183 16.01.2014 US
Title (EN) THERMO-COMPRESSION BONDING SYSTEM, SUBSYSTEMS, AND METHODS OF USE
(FR) SYSTÈME DE COLLAGE PAR THERMO-COMPRESSION, SOUS-SYSTÈMES, ET PROCÉDÉS D'UTILISATION
Abstract: front page image
(EN)Co-planarity adjustment systems and methods, gantries capable of applying high force without imposing moment loads to their bearings, systems and methods for achieving rapid heating and cooling and efficient slidable seal systems capable of sealing a chamber and injecting one or more fluids into the chamber as well as actively recovering portions of such fluid which have migrated into the seal itself are disclosed in the context of thermo-compression bonding systems, apparatuses and methods, although many alternative uses will be apparent to those of skill in the art.
(FR)La présente invention concerne des systèmes et des procédés de réglage de la coplanarité, des portiques capables d'exercer une grande force sans imposer de charges de moment sur leurs paliers, des systèmes et des procédés de chauffage et de refroidissement rapide, et des systèmes de joints coulissants efficaces capables de fermer une chambre et d'injecter un ou plusieurs liquides dans la chambre, et de récupérer activement les parties dudit liquide qui ont migré vers le joint lui-même, l'invention se rapportant au domaine des systèmes, des appareils et des procédés de collage par thermo-compression, bien que plusieurs utilisations alternatives soient évidentes pour l'homme du métier.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)