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1. (WO2014186085) DIFFUSER FOR LAMP HEATING ASSEMBLY
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/186085    International Application No.:    PCT/US2014/034201
Publication Date: 20.11.2014 International Filing Date: 15.04.2014
IPC:
H01L 21/324 (2006.01), H01L 21/02 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054 (US)
Inventors: RANISH, Joseph M.; (US)
Agent: PATTERSON, B. Todd; Patterson & Sheridan, L.L.P. 24 Greenway Plaza, Suite 1600 Houston, Texas 77046 (US)
Priority Data:
61/823,641 15.05.2013 US
Title (EN) DIFFUSER FOR LAMP HEATING ASSEMBLY
(FR) DIFFUSEUR POUR ENSEMBLE DE CHAUFFAGE DE LAMPE
Abstract: front page image
(EN)Embodiments of the present disclosure generally relate to optically transparent windows and processing chambers including the same. The optically transparent window includes light-diffusing structures formed thereon. The light diffusing structures may include a scalloped or dimpled surface having protruding or indented features, or a frosted surface. The light-diffusing structures facilitate more uniform heating of substrates by reducing thermal hot spots caused by uneven irradiation by lamps.
(FR)Des modes de réalisation de la présente invention concernent d'une manière générale des fenêtres optiquement transparentes et des chambres de traitement comprenant celles-ci. Des structures de diffusion de la lumière sont formées sur la fenêtre optiquement transparente. Les structures de diffusion de la lumière peuvent comprendre une surface dentelée ou à encoche ayant des éléments en saillie ou indentés, ou une surface dépolie. Les structures de diffusion de la lumière facilitent un chauffage plus uniforme de substrats en réduisant les points chauds causés par le rayonnement irrégulier des lampes.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)