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1. (WO2014184114) TEMPLATE FOR SELF ASSEMBLY AND METHOD OF MAKING A SELF ASSEMBLED PATTERN
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/184114    International Application No.:    PCT/EP2014/059568
Publication Date: 20.11.2014 International Filing Date: 09.05.2014
IPC:
G03F 7/00 (2006.01)
Applicants: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À.R.L. [LU/LU]; 32-36, Boulevard d`Avranches L-1160 Luxembourg (LU) (AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BE, BF, BG, BH, BJ, BN, BR, BW, BY, BZ, CA, CF, CG, CH, CI, CL, CM, CN, CO, CR, CU, CY, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, FR, GA, GB, GD, GE, GH, GM, GN, GQ, GR, GT, GW, HN, HR, HU, ID, IE, IL, IN, IR, IS, IT, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MC, MD, ME, MG, MK, ML, MN, MR, MT, MW, MX, MY, MZ, NA, NE, NG, NI, NL, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SI, SK, SL, SM, SN, ST, SV, SY, SZ, TD, TG, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, UZ, VC, VN, ZA, ZM, ZW only)
Inventors: KIM, Jihoon; (US).
WAN, Jingxiu; (US).
MIYAZAKI, Shinji; (JP).
LIN, Guanyang; (US).
WU, Hengpeng; (US)
Agent: FÉAUX DE LACROIX, Stefan; Isenbruck Bösl Hörschler LLP EASTSITE ONE Seckenheimer Landstraße 4 68163 Mannheim (DE)
Priority Data:
13/892,890 13.05.2013 US
Title (EN) TEMPLATE FOR SELF ASSEMBLY AND METHOD OF MAKING A SELF ASSEMBLED PATTERN
(FR) MODÈLE POUR AUTOASSEMBLAGE ET PROCÉDÉ DE FABRICATION DE MOTIF AUTOASSEMBLÉ
Abstract: front page image
(EN)Disclosed and claimed herein is a template for directing a pattern in a block copolymer film and the process of making the pattern.
(FR)L'invention concerne un modèle pour diriger un motif dans un film de coloplymère séquencé et un procédé de fabrication du motif.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)