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1. (WO2014181858) OPTICAL ELEMENT, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/181858    International Application No.:    PCT/JP2014/062447
Publication Date: 13.11.2014 International Filing Date: 09.05.2014
IPC:
H01L 21/027 (2006.01), G03F 1/24 (2012.01), G03F 1/38 (2012.01)
Applicants: NIKON CORPORATION [JP/JP]; 12-1, Yurakucho 1-chome, Chiyoda-ku, Tokyo 1008331 (JP)
Inventors: KANDAKA Noriaki; (JP)
Agent: SHIGA Masatake; 1-9-2, Marunouchi, Chiyoda-ku, Tokyo 1006620 (JP)
Priority Data:
2013-099216 09.05.2013 JP
Title (EN) OPTICAL ELEMENT, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
(FR) ÉLÉMENT OPTIQUE, SYSTÈME OPTIQUE DE PROJECTION, APPAREIL D'EXPOSITION, ET PROCÉDÉ DE FABRICATION DE DISPOSITIF
(JA) 光学素子、投影光学系、露光装置及びデバイス製造方法
Abstract: front page image
(EN)An optical element is provided with: a substrate; a multilayer film disposed on the substrate and formed by stacking a plurality of unit laminated structures each having a first layer and a second layer disposed on the first layer; and a plurality of spacer layers respectively disposed in different interlayer positions from each other among interlayer positions between the unit laminated structures.
(FR)Un élément optique est pourvu : d'un substrat ; d'un film multicouche disposé sur le substrat et formé par empilement d'une pluralité de structures stratifiées unitaires possédant chacune une première couche et une deuxième couche disposée sur la première couche ; et d'une pluralité de couches d'espacement disposées respectivement dans différentes positions intercouches parmi des positions intercouches entre les structures stratifiées de l'unité.
(JA) 光学素子は、基材と、基材上に配置され、第一層と第一層上に配置された第二層とを有する単位積層構造が複数積層された多層膜と、単位積層構造同士の層間のうち互いに異なる層間に配置された複数のスペーサ層とを備える。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)