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Machine translation
1. (WO2014179093) FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/179093    International Application No.:    PCT/US2014/034785
Publication Date: 06.11.2014 International Filing Date: 21.04.2014
IPC:
H01L 21/02 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054 (US)
Inventors: SAMIR, Mehmet Tugrul; (US).
LAU, Shu-Kwan; (US)
Agent: PATTERSON, B. Todd; Patterson & Sheridan, L.L.P. 24 Greenway Plaza, Suite 1600 Houston, Texas 77046 (US)
Priority Data:
61/817,691 30.04.2013 US
Title (EN) FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES
(FR) CHEMISAGE DE RÉGLAGE D'ÉCOULEMENT AYANT DES PASSAGES DE GAZ RÉPARTIS DANS L'ESPACE
Abstract: front page image
(EN)Embodiments of the present disclosure provide a liner assembly including a plurality of individually separated gas passages. The liner assembly enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present disclosure.
(FR)Des modes de réalisation de la présente invention portent sur un ensemble chemisage comprenant une pluralité de passages de gaz individuellement séparés. L'ensemble chemisage permet de tenir des paramètres d'écoulement, tels que la vitesse, la densité, la direction et la position dans l'espace, sur tout un substrat en train d'être traité. Le gaz de traitement sur tout le substrat en train d'être traité peut être spécialement conçu pour des procédés individuels utilisant un ensemble chemisage selon un mode de réalisation de la présente invention.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)