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1. (WO2014178572) MEMS MAGNETIC FIELD SENSOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/178572    International Application No.:    PCT/KR2014/003585
Publication Date: 06.11.2014 International Filing Date: 24.04.2014
IPC:
G01R 33/02 (2006.01), G01R 27/26 (2006.01), B81B 3/00 (2006.01)
Applicants: LG INNOTEK CO., LTD. [KR/KR]; Seoul Square, 416, Hangang-daero Jung-gu Seoul 100-714 (KR)
Inventors: SEO, Sang Won; (KR).
KO, Yong Jun; (KR).
KWON, Seung Hwa; (KR).
SEO, Jeong Gi; (KR).
JI, Chil Young; (KR).
CHOI, Wan Seop; (KR)
Agent: KIM, Ki Moon; 6th Fl. Hyun Juk Bldg. 114, Yeoksam-ro Gangnam-gu Seoul 135-936 (KR)
Priority Data:
10-2013-0050332 03.05.2013 KR
Title (EN) MEMS MAGNETIC FIELD SENSOR
(FR) CAPTEUR DE CHAMP MAGNÉTIQUE MEMS
(KO) 멤스 자계 센서
Abstract: front page image
(EN)The present invention provides a magnetic field sensor for sensing the magnetic field caused by a current to be measured, which includes: substrate; a first drive electrode with a path for flowing a reference current supplied from the substrate arranged so as to be moveable by the magnetic field of the current to be measured; and a second drive electrode with a path for flowing a reference current supplied from the substrate arranged so as to be moveable by the magnetic field of the current to be measured, thus measuring the variation of a capacitance caused by the movement of the first drive electrode and the second drive electrode. Hence, the sensing is achieved by the two drive electrodes with no fixed electrode, thus maximizing the mechanical displacement to improve the sensing capability.
(FR)La présente invention concerne un capteur de champ magnétique permettant de détecter le champ magnétique provoqué par un courant devant être mesuré et qui comprend : un substrat; une première électrode de commande dotée d'un trajet permettant la circulation d'un courant de référence fourni par le substrat conçu de façon à pouvoir être déplacé par le champ magnétique du courant devant être mesuré; et une seconde électrode de commande dotée d'un trajet permettant la circulation d'un courant de référence fourni par le substrat conçu pour pouvoir être déplacé par le champ magnétique du courant devant être mesuré, ce qui permet de mesurer la variation d'une capacité provoquée par le mouvement de la première électrode de commande et de la seconde électrode de commande. Ainsi, la détection est obtenue par les deux électrodes de commande sans électrode fixe, ce qui permet d'augmenter au maximum le déplacement mécanique afin d'améliorer la capacité de détection.
(KO)본 발명은 측정 대상 전류에 의한 자계를 센싱하는 자계 센서로서, 기판; 상기 기판으로부터 공급된 기준 전류를 유동시키는 경로를 가지며, 상기 측정 대상 전류의 자계에 의해 이동 가능한 제1 구동전극; 및 상기 기판으로부터 공급된 기준 전류를 유동시키는 경로를 가지며, 상기 측정 대상 전류의 자계에 의해 이동 가능한 제2 구동전극을 포함하며, 상기 제1 구동전극과 상기 제2 구동전극의 이동에 의한 커패시턴스의 변화를 측정하는 자계 센서를 제공한다. 따라서, 고정 전극 없이 구동 전극 2개로 감지하므로 기계적 변위량을 최대화하여 감지능이 개선될 수 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)