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Machine translation
1. (WO2014178382) Li-CONTAINING OXIDE TARGET ASSEMBLY
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/178382    International Application No.:    PCT/JP2014/061894
Publication Date: 06.11.2014 International Filing Date: 28.04.2014
IPC:
C23C 14/34 (2006.01), C04B 37/02 (2006.01)
Applicants: KOBELCO RESEARCH INSTITUTE, INC. [JP/JP]; 1-5-1, Wakinohama-kaigan-dori, Chuo-ku, Kobe-shi, Hyogo 6510073 (JP)
Inventors: TAKETOMI, Yuichi; .
KANAMARU, Moriyoshi; .
YOSHIDA, Shintaro;
Agent: UEKI, Kyuichi; Fujita-Toyobo Building 9th floor, 1-16, Dojima 2-chome, Kita-ku, Osaka-shi, Osaka 5300003 (JP)
Priority Data:
2013-095696 30.04.2013 JP
Title (EN) Li-CONTAINING OXIDE TARGET ASSEMBLY
(FR) ENSEMBLE CIBLE D'OXYDE CONTENANT DU LITHIUM
(JA) Li含有酸化物ターゲット接合体
Abstract: front page image
(EN)Provided is a Li-containing oxide target assembly which is produced by bonding a Li-containing oxide sputtering target to an Al-based or Cu-based backing plate through a bonding material, and which does not undergo the occurrence of warpage or breakage during the bonding. The Li-containing oxide target assembly according to the present invention is produced by bonding a Li-containing oxide sputtering target to a backing plate through a bonding material, and has bending strength of 20 MPa or more.
(FR)L'invention concerne un ensemble cible d'oxyde contenant du lithium (Li) qui est produit par collage d'une cible de pulvérisation d'oxyde contenant du Li sur une plaque support à base d'aluminium (Al) ou de cuivre (Cu) au moyen d'un matériau de liaison, et qui n'est ni déformé ni soumis à une rupture lors du collage. L'ensemble cible d'oxyde contenant du Li selon la présente invention est produit par collage d'une cible de pulvérisation d'oxyde contenant du Li sur une plaque support par un matériau de liaison, et présente une résistance à la flexion de 20 MPa ou plus.
(JA) Li含有酸化物スパッタリングターゲットと、Al系やCu系などのバッキングプレートとを、ボンディング材を介してターゲット接合体とする際の反りや割れの発生を抑制し得るLi含有酸化物ターゲット接合体を提供する。本発明のLi含有酸化物ターゲット接合体は、Li含有酸化物スパッタリングターゲットとバッキングプレートが、ボンディング材を介して接合されたターゲット接合体であって、Li含有酸化物スパッタリングターゲットの曲げ強度は20MPa以上である。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)