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1. WO2014170986 - SUBSTRATE DETECTION SYSTEM AND SUBSTRATE DETECTION METHOD

Publication Number WO/2014/170986
Publication Date 23.10.2014
International Application No. PCT/JP2013/061489
International Filing Date 18.04.2013
IPC
H01L 21/67 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/205 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18the devices having semiconductor bodies comprising elements of group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
20Deposition of semiconductor materials on a substrate, e.g. epitaxial growth
205using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
H01L 21/3065 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18the devices having semiconductor bodies comprising elements of group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
302to change the physical characteristics of their surfaces, or to change their shape, e.g. etching, polishing, cutting
306Chemical or electrical treatment, e.g. electrolytic etching
3065Plasma etching; Reactive-ion etching
CPC
H01L 21/67265
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67242Apparatus for monitoring, sorting or marking
67259Position monitoring, e.g. misposition detection or presence detection
67265of substrates stored in a container, a magazine, a carrier, a boat or the like
Applicants
  • 株式会社島津製作所 SHIMADZU CORPORATION [JP]/[JP]
Inventors
  • 上田 雅弘 UEDA, Masahiro
  • 三科 健 MISHINA, Ken
Agents
  • 三好 秀和 MIYOSHI, Hidekazu
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE DETECTION SYSTEM AND SUBSTRATE DETECTION METHOD
(FR) SYSTÈME DE DÉTECTION DE SUBSTRAT ET PROCÉDÉ DE DÉTECTION DE SUBSTRAT
(JA) 基板検出システム及び基板検出方法
Abstract
(EN)
This system is equipped with: a substrate carrier which is provided with a substrate loading surface defining a substrate loading region upon which a substrate is loaded, and in which a detection mark is disposed in an inspection region that includes at least a portion of the substrate loading region on the substrate loading surface; imaging devices which acquire assessment images by photographing the substrate loading surface upon which the substrate is loaded such that the inspection region is included; and an assessment device which assesses that the substrate is properly loaded upon the substrate loading surface in cases in which the assessment images do not include an image of the portion of the detection mark disposed in the substrate loading region, and which assesses that the substrate is not properly loaded upon the substrate loading surface in cases in which the assessment images include an image of the portion of the detection mark disposed in the substrate loading region.
(FR)
L'invention concerne un système équipé de : un porte-substrat qui est doté d'une surface de chargement de substrat définissant une région de chargement de substrat sur laquelle est chargé un substrat, et dans laquelle un repère de détection est disposé dans une région d'inspection qui inclut au moins une portion de la région de chargement de substrat sur la surface de chargement de substrat; des dispositifs d'imagerie qui capturent des images d'évaluation en photographiant la surface de chargement de substrat sur laquelle est chargé le substrat de manière à inclure la région d'inspection; et un dispositif d'évaluation qui évalue que le substrat est chargé correctement sur la surface de chargement de substrat dans les cas où les images d'évaluation n'incluent pas une image de la portion du repère de détection disposé dans la région de chargement de substrat, et qui évalue que le substrat n'est pas chargé correctement sur la surface de chargement de substrat dans les cas où les images d'évaluation incluent une image de la portion du repère de détection disposé dans la région de chargement de substrat.
(JA)
 基板が装着される基板装着領域が定義された基板装着面を有し、基板装着面の少なくとも基板装着領域の一部を含む検査領域に検出マークが配置された基板キャリアと、基板が装着された基板装着面を、検査領域が含まれるように撮影して判定用画像を取得する撮像装置と、検出マークの基板装着領域に配置された部分の画像が判定用画像に含まれていない場合に基板が基板装着面に正常に装着されていると判定し、検出マークの基板装着領域に配置された部分の画像が判定用画像に含まれている場合に基板が基板装着面に正常に装着されていないと判定する判定装置とを備える。
Also published as
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