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1. WO2014164966 - COMPOSITE END EFFECTORS

Publication Number WO/2014/164966
Publication Date 09.10.2014
International Application No. PCT/US2014/023955
International Filing Date 12.03.2014
IPC
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
H01L 21/68 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68for positioning, orientation or alignment
CPC
B25J 15/0014
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads ; and other end effectors
0014having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
B25J 9/0012
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
0009Constructional details, e.g. manipulator supports, bases
0012making use of synthetic construction materials, e.g. plastics, composites
H01L 21/67742
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67739into and out of processing chamber
67742Mechanical parts of transfer devices
H01L 21/67766
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67763the wafers being stored in a carrier, involving loading and unloading
67766Mechanical parts of transfer devices
Applicants
  • VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. [US]/[US]
Inventors
  • PERGANDE, Paul E.
  • FORDERHASE, Paul
Agents
  • DAISAK, Daniel N.
Priority Data
14/200,54707.03.2014US
61/778,52413.03.2013US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) COMPOSITE END EFFECTORS
(FR) EFFECTEUR D'EXTRÉMITÉ COMPOSITE
Abstract
(EN)
An end effector includes a base, a plurality of fingers extending from the base, and a plurality of pads disposed on each of said fingers to support a substrate. The fingers comprise a carbon fiber material and taper from a first diameter and first wall thickness proximate said base to a second diameter smaller than said first diameter and second wall thickness smaller than said first wall thickness distal said base. A method includes adhering a plurality of pads along a plurality of tapered fingers, and adhering proximal ends of the plurality of tapered fingers with corresponding recesses of a base. The assembled pads, tapered fingers and base are placed on a fixture such that top surfaces of the plurality of pads rest on a top surface of the fixture and the assembly is held in place on the fixture until the adhesive has cured at room temperature.
(FR)
L'invention concerne un effecteur d'extrémité comprenant une base, une pluralité de doigts qui s'étendent depuis la base et une pluralité de pastilles disposées sur chacun desdits doigts pour supporter un substrat. Les doigts comprennent un matériau en fibres de carbone et sont effilés depuis un premier diamètre et une première épaisseur de paroi proximaux de ladite base vers un deuxième diamètre plus petit que ledit premier diamètre et une deuxième épaisseur de paroi plus petite que ladite première épaisseur de paroi distaux de ladite base. L'invention concerne également un procédé incluant le collage d'une pluralité de pastilles le long d'une pluralité de doigts effilés et le collage des extrémités proximales de la pluralité de doigts effilés avec des enfoncements correspondants d'une base. Les pastilles assemblées, les doigts effilés et la base sont placés sur un dispositif de fixation de telle sorte que les surfaces supérieures de la pluralité de pastilles reposent sur une surface supérieure du dispositif de fixation et l'ensemble est maintenu en place sur le dispositif de fixation jusqu'à ce que la colle ait durci à température ambiante.
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