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1. WO2014141114 - MEMS HINGES WITH ENHANCED ROTATABILITY

Publication Number WO/2014/141114
Publication Date 18.09.2014
International Application No. PCT/IB2014/059710
International Filing Date 13.03.2014
IPC
G02B 26/08 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating or modulating
08for controlling the direction of light
CPC
B81B 2201/0235
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
02Sensors
0228Inertial sensors
0235Accelerometers
B81B 2201/034
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
03Microengines and actuators
034Electrical rotating micromachines
B81B 2201/042
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
04Optical MEMS
042Micromirrors, not used as optical switches
B81B 2203/0118
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
01Suspended structures, i.e. structures allowing a movement
0118Cantilevers
B81B 2203/0163
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
01Suspended structures, i.e. structures allowing a movement
0145Flexible holders
0163Spring holders
B81B 3/0043
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
0035Constitution or structural means for controlling the movement of the flexible or deformable elements
004Angular deflection
0043Increasing angular deflection
Applicants
  • ERLICH, Raviv [IL]/[IL]
  • GERSON, Yuval [IL]/[IL]
Inventors
  • ERLICH, Raviv
  • GERSON, Yuval
Agents
  • D. KLIGLER I.P. SERVICES LTD.
Priority Data
61/781,08614.03.2013US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) MEMS HINGES WITH ENHANCED ROTATABILITY
(FR) CHARNIÈRES MEMS AYANT UNE MEILLEURE ROTATION
Abstract
(EN) A mechanical device (20, 50, 70, 80, 120) includes a long, narrow element (26, 54, 66, 90, 122) made of a rigid, elastic material. A rigid frame (28, 52, 64, 92) is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material (30, 56, 68, 94, 102, 124), different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.
(FR) Selon cette invention, un dispositif mécanique (20, 50, 70, 80, 120) comprend un élément long et étroit (26, 54, 66, 90, 122) constitué d'une matière rigide et élastique. Une structure rigide (28, 52, 64, 92) est conçue pour maintenir au moins une extrémité dudit élément, qui est fixée à cette structure, et pour délimiter un interstice s'étendant longitudinalement le long de l'élément entre la poutre et la structure, de sorte que l'élément est libre de se déplacer dans l'interstice. Une matière de remplissage solide (30, 56, 68, 94, 102, 124) différente de la matière rigide et élastique remplit au moins une partie de l'interstice entre l'élément et la structure, de manière à permettre un premier mode de mouvement dudit élément dans l'interstice et à empêcher en même temps un second mode de mouvement différent du premier.
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