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1. WO2014112205 - MEASUREMENT INSPECTION DEVICE

Publication Number WO/2014/112205
Publication Date 24.07.2014
International Application No. PCT/JP2013/081535
International Filing Date 22.11.2013
IPC
H01J 37/22 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
22Optical or photographic arrangements associated with the tube
H01J 37/24 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
H01J 37/28 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron- or ion-diffraction tubes
28with scanning beams
H01L 21/66 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
CPC
H01J 2237/221
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
22Treatment of data
221Image processing
H01J 2237/2448
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
244Detection characterized by the detecting means
2448Secondary particle detectors
H01J 2237/2485
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
248Components associated with the control of the tube
2485Electric or electronic means
H01J 2237/2809
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
26Electron or ion microscopes
28Scanning microscopes
2809characterised by the imaging problems involved
H01J 37/244
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
244Detectors; Associated components or circuits therefor
H01J 37/265
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron or ion diffraction tubes
261Details
265Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
Applicants
  • 株式会社日立ハイテクノロジーズ HITACHI HIGH-TECHNOLOGIES CORPORATION [JP]/[JP]
Inventors
  • 李 ウェン LI, Wen
  • 高橋 弘之 TAKAHASHI, Hiroyuki
  • 鈴木 誠 SUZUKI, Makoto
  • 川野 源 KAWANO, Hajime
Agents
  • 筒井 大和 TSUTSUI, Yamato
Priority Data
2013-00770618.01.2013JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) MEASUREMENT INSPECTION DEVICE
(FR) DISPOSITIF D'INSPECTION DE MESURE
(JA) 計測検査装置
Abstract
(EN) Provided is a technology relating to a scanning electron beam measurement inspection device, whereby it is possible to implement high-precision measurement and inspection at various scan velocities. A secondary electron signal detection system in this measurement inspection device is capable of scan control at a plurality of scan velocities, and comprises: a detector (107) which detects a secondary electron signal (SE) from a projection of an electron beam upon a sample (110) from scan control; a pre-amp (30) which current-voltage converts the output of the detector and pre-amplifies same; an analog signal processing/amplification part (51) which receives input of the output of the pre-amp (30) and analog processes and amplifies same, and an ADC (52) which analog-digital converts the output thereof, as a secondary electron signal detection part (50); and an image processing part (205) which generates an image of measurement or inspection on the basis of the output thereof. The control part (210) switch controls each part, including an LPF (12) within the analog signal processing/amplification part (51), according to the scan velocity, etc.
(FR) La présente invention porte sur une technologie concernant un dispositif d'inspection de mesure de faisceau d'électrons de balayage, selon laquelle il est possible de mettre en œuvre une mesure et une inspection à haute précision à diverses vitesses de balayage. Un système de détection de signal électronique secondaire dans ce dispositif d'inspection de mesure est capable d'un contrôle de balayage à une pluralité de vitesses de balayage, et comprend : un détecteur (107) qui détecte un signal électronique secondaire (SE) provenant d'une projection d'un faisceau d'électrons sur un échantillon (110) provenant d'un contrôle de balayage ; un préamplificateur (30) qui convertit de manière courant-tension la sortie du détecteur et préamplifie celle-ci ; une partie de traitement/amplification de signal analogique (51) qui reçoit une entrée de la sortie du préamplificateur (30) et traite et amplifie de manière analogique celle-ci, et un convertisseur analogique-numérique (52) qui convertit de manière analogique-numérique la sortie de celui-ci, en tant que partie de détection de signal électronique secondaire (50) ; et une partie de traitement d'image (205) qui génère une image de mesure ou d'inspection sur la base de la sortie de celle-ci. Le commutateur de partie de commande (210) commande chaque partie, y compris un filtre passe-bas (LPF) (12) à l'intérieur de la partie de traitement/amplification de signal analogique (51), en fonction de la vitesse de balayage, etc.
(JA) 走査型電子ビーム方式の計測検査装置に関し、走査速度に対応して高精度な計測・検査を実現できる技術を提供する。本計測検査装置における二次電子信号検出系は、複数の走査速度の走査制御に対応しており、走査制御による試料(110)への電子ビームの照射による二次電子信号(SE)を検出する検出器(107)と、その出力を電流-電圧変換して前置増幅するプリアンプ(30)と、二次電子信号検出部(50)として、プリアンプ(30)の出力を入力しアナログ処理増幅するアナログ信号処理増幅部51、及びその出力をアナログ・デジタル変換するADC(52)と、その出力をもとに計測または検査の画像を生成する画像処理部(205)とを有する。制御部(210)は、走査速度などに応じて、アナログ信号処理増幅部(51)内のLPF(12)を含む各部を切り替え制御する。
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