Processing

Please wait...

Settings

Settings

Goto Application

1. WO2014103617 - ALIGNMENT DEVICE, DEFECT INSPECTION DEVICE, ALIGNMENT METHOD, AND CONTROL PROGRAM

Publication Number WO/2014/103617
Publication Date 03.07.2014
International Application No. PCT/JP2013/082251
International Filing Date 29.11.2013
IPC
G01N 21/956 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
95characterised by the material or shape of the object to be examined
956Inspecting patterns on the surface of objects
G06T 1/00 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
1General purpose image data processing
CPC
G01N 21/956
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
95characterised by the material or shape of the object to be examined
956Inspecting patterns on the surface of objects
G06T 2207/30148
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
30Subject of image; Context of image processing
30108Industrial image inspection
30148Semiconductor; IC; Wafer
G06T 7/001
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
0002Inspection of images, e.g. flaw detection
0004Industrial image inspection
001using an image reference approach
G06T 7/33
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
30Determination of transform parameters for the alignment of images, i.e. image registration
33using feature-based methods
Applicants
  • シャープ株式会社 SHARP KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • 柳瀬 正和 YANASE, Masakazu
Agents
  • 特許業務法人原謙三国際特許事務所 HARAKENZO WORLD PATENT & TRADEMARK
Priority Data
2012-28317326.12.2012JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) ALIGNMENT DEVICE, DEFECT INSPECTION DEVICE, ALIGNMENT METHOD, AND CONTROL PROGRAM
(FR) DISPOSITIF D'ALIGNEMENT, DISPOSITIF D'INSPECTION DES DÉFAUTS, PROCÉDÉ D'ALIGNEMENT, ET PROGRAMME DE COMMANDE
(JA) 位置合せ装置、欠陥検査装置、位置合せ方法、及び制御プログラム
Abstract
(EN) A defect inspection device (1) is provided with an image-transformation determination unit (103) and an alignment unit (104). The image-transformation determination unit (103) determines an image transformation by weighting high-importance alignment regions that include edge sections that make it possible to identify similar regions in a model-article image (202). The alignment unit (104) applies said image transformation to the model-article image (202) and a taken image, yielding aligned images.
(FR) Cette invention concerne un dispositif d'inspection des défauts (1) comprenant une unité de détermination de transformation d'image (103) et une unité d'alignement (104). L' unité de détermination de transformation d'image (103) détermine la transformation d'une image par pondération des régions d'alignement de haute importance qui comprennent des parties de bords permettant d'identifier des régions similaires dans une image d'article modèle (202). L'unité d'alignement (104) applique ladite transformation d'image à l'image de l'article modèle (202) et à une image prise, pour générer des images alignées.
(JA)  欠陥検査装置(1)は、良品画像(202)中における類似の領域との識別を可能にするエッジ部分を含むアライメント重要領域に重み付けを行って画像変換を決定する画像変換決定部(103)と、該画像変換を良品画像(202)および検査画像に施すことによって、位置合わせされた画像を生成する位置合せ部(104)と、を備えている。
Related patent documents
Latest bibliographic data on file with the International Bureau