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1. WO2014091435 - DETECTING FAILURE OF SCANNING MIRROR

Publication Number WO/2014/091435
Publication Date 19.06.2014
International Application No. PCT/IB2013/060839
International Filing Date 12.12.2013
IPC
G02B 26/08 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating or modulating
08for controlling the direction of light
B81C 99/00 2010.1
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
99Subject matter not provided for in other groups of this subclass
CPC
B81B 2201/042
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
04Optical MEMS
042Micromirrors, not used as optical switches
B81B 2203/058
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
05Type of movement
058Rotation out of a plane parallel to the substrate
B81B 3/004
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
0035Constitution or structural means for controlling the movement of the flexible or deformable elements
004Angular deflection
B81C 1/00015
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
00015for manufacturing microsystems
B81C 99/003
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
99Subject matter not provided for in other groups of this subclass
003Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
G01M 11/005
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
005Testing of reflective surfaces, e.g. mirrors
Applicants
  • APPLE INC [US]/[US]
Inventors
  • SHPUNT, Alexander
Agents
  • D. KLIGLER I.P. SERVICES LTD
Priority Data
61/736,55113.12.2012US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) DETECTING FAILURE OF SCANNING MIRROR
(FR) DÉTECTION D'UNE DÉFAILLANCE D'UN MIROIR DE BALAYAGE
Abstract
(EN) A method for monitoring includes providing a device (64) including a first part (46) and a second part (72) and a movable joint (70) connecting the first part to the second part. An electrical characteristic of a conductive path (80) crossing the movable joint is measured, and a remedial action is initiated in response to detecting a change of the electrical characteristic.
(FR) La présente invention se rapporte à un procédé de surveillance qui consiste à fournir un dispositif (64) qui comprend une première partie (46) et une seconde partie (72), ainsi qu'une articulation mobile (70) qui relie la première partie à la seconde partie. Une caractéristique électrique d'un trajet conducteur (80) qui coupe l'articulation mobile est mesurée, et une action corrective est initiée en réponse à la détection d'une modification de la caractéristique électrique.
Related patent documents
DE1120130059800This application is not viewable in PATENTSCOPE because the national phase entry has not been published yet or the national entry is issued from a country that does not share data with WIPO or there is a formatting issue or an unavailability of the application.
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