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1. WO2014085611 - MEMS PRESSURE SENSOR ASSEMBLY WITH ELECTROMAGNETIC SHIELD

Publication Number WO/2014/085611
Publication Date 05.06.2014
International Application No. PCT/US2013/072271
International Filing Date 27.11.2013
IPC
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
12
by making use of variations in capacitance
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19
Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
06
Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1
Measuring force or stress, in general
14
by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
G01L 9/00 (2006.01)
G01L 9/12 (2006.01)
G01L 19/06 (2006.01)
G01L 1/14 (2006.01)
CPC
G01L 1/142
G01L 19/069
G01L 9/0073
G01L 9/12
G01L 9/14
Applicants
  • ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 D-70442 Stuttgart, DE
  • O' BRIEN, Gary [US/US]; US
  • FEYH, Ando [DE/US]; US
  • GRAHAM, Andrew [US/US]; US
Inventors
  • O' BRIEN, Gary; US
  • FEYH, Ando; US
  • GRAHAM, Andrew; US
Agents
  • MAGINOT, Paul, J.; Maginot, Moore & Beck LLP One Indiana Square, Suite 2200 Indianapolis, IN 46204, US
Priority Data
61/732,27330.11.2012US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MEMS PRESSURE SENSOR ASSEMBLY WITH ELECTROMAGNETIC SHIELD
(FR) ENSEMBLE CAPTEUR DE PRESSION MEMS AVEC BLINDAGE ÉLECTROMAGNÉTIQUE
Abstract
(EN)
A pressure sensor assembly includes a pressure sensor die and a circuit die. The pressure sensor die includes a MEMS pressure sensor and an electromagnetic shield layer. The circuit die includes an ASIC configured to generate an electrical output corresponding to a pressure sensed by the MEMS pressure sensor. The ASIC is electrically connected to the pressure sensor die. The electromagnetic shield is configured to shield the MEMS pressure sensor and the ASIC from electromagnetic radiation.
(FR)
L'invention concerne un ensemble capteur de pression comprenant une pastille de capteur de pression et une pastille à circuit. La pastille de capteur de pression comprend un capteur de pression MEMS et une couche de blindage électromagnétique. La pastille à circuit comprend un ASIC configuré pour générer une sortie électrique correspondant à une pression détectée par le capteur de pression MEMS. L'ASIC est relié électriquement à la pastille de capteur de pression. Le blindage électromagnétique est configuré pour protéger le capteur de pression MEMS et l'ASIC des rayonnements électromagnétiques.
Also published as
Latest bibliographic data on file with the International Bureau