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1. (WO2014083218) METHOD FOR PRODUCING A DIELECTRIC AND/OR BARRIER LAYER OR MULTILAYER ON A SUBSTRATE, AND DEVICE FOR IMPLEMENTING SAID METHOD
Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
Spain 22.05.2015P201590049Published: 03.08.2015
Granted: 25.05.2016
United States of America 27.05.201514647800Published: 12.11.2015
Republic of Korea1020157017293Withdrawn: 28.12.2018