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1. (WO2013162962) THREE-COIL INDUCTIVELY COUPLED PLASMA SOURCE WITH INDIVIDUALLY CONTROLLED COIL CURRENTS FROM A SINGLE RF POWER GENERATOR

Pub. No.:    WO/2013/162962    International Application No.:    PCT/US2013/036897
Publication Date: Fri Nov 01 00:59:59 CET 2013 International Filing Date: Thu Apr 18 01:59:59 CEST 2013
IPC: H05H 1/46
H03H 7/40
Applicants: APPLIED MATERIALS, INC.
Inventors: DORF, Leonid
RAUF, Shahid
LIU, Jonathan
KENNEY, Jason A.
NGUYEN, Andrew
COLLINS, Kenneth S.
RAMASWAMY, Kartik
LANE, Steven
Title: THREE-COIL INDUCTIVELY COUPLED PLASMA SOURCE WITH INDIVIDUALLY CONTROLLED COIL CURRENTS FROM A SINGLE RF POWER GENERATOR
Abstract:
An inductively coupled plasma reactor has three concentric coil antennas and a current divider circuit individually controlling currents in each of the three coil antennas by varying two variable impedance elements in the current divider circuit in response to a desired current apportionment among the coil antennas received from a user interface.