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1. (WO2013162712) OPTICS FOR CONTROLLING LIGHT TRANSMITTED THROUGH A CONICAL QUARTZ DOME

Pub. No.:    WO/2013/162712    International Application No.:    PCT/US2013/029344
Publication Date: Fri Nov 01 00:59:59 CET 2013 International Filing Date: Thu Mar 07 00:59:59 CET 2013
IPC: H01L 21/205
H01L 21/324
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
RANISH, Joseph M.
Inventors: RANISH, Joseph M.
Title: OPTICS FOR CONTROLLING LIGHT TRANSMITTED THROUGH A CONICAL QUARTZ DOME
Abstract:
Embodiments described herein generally relate to apparatus for heating substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps is positioned to provide radiant energy through an optically transparent dome to a substrate positioned on the substrate support. A light focusing assembly is positioned within the chamber to influence heating and temperature distribution on the substrate and to facilitate formation of a film on a substrate having uniform properties, such as density. The light focusing assembly can include one or more reflectors, light pipes, or refractive lenses.