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Machine translation
1. (WO2013162697) METHOD AND APPARATUS FOR SUBSTRATE SUPPORT WITH MULTI-ZONE HEATING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/162697    International Application No.:    PCT/US2013/027824
Publication Date: 31.10.2013 International Filing Date: 26.02.2013
IPC:
H01L 21/683 (2006.01), H01L 21/205 (2006.01), H05B 3/20 (2006.01), C23C 16/46 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054 (US) (For All Designated States Except US).
YANG, Yao-Hung [US/US]; (US) (US only).
OH, Jeonghoon [US/US]; (US) (US only).
HOOSHDARAN, Frank F. [US/US]; (US) (US only).
CHO, Tom K. [US/US]; (US) (US only).
HOU, Tao [CN/US]; (US) (US only)
Inventors: YANG, Yao-Hung; (US).
OH, Jeonghoon; (US).
HOOSHDARAN, Frank F.; (US).
CHO, Tom K.; (US).
HOU, Tao; (US)
Agent: PATTERSON, B. Todd; Patterson & Sheridan, LLP 24 Greenway Plaza, Suite 1600 Houston, TX 77046 (US)
Priority Data:
61/639,781 27.04.2012 US
Title (EN) METHOD AND APPARATUS FOR SUBSTRATE SUPPORT WITH MULTI-ZONE HEATING
(FR) PROCÉDÉ ET APPAREIL POUR SUPPORT DE SUBSTRAT À CHAUFFAGE MULTI-ZONE
Abstract: front page image
(EN)Methods and substrate processing systems are provided for controlling substrate heating efficiency and generating a desired temperature profile on the surface of a substrate when the substrate is disposed on a substrate support surface of a substrate support assembly. The substrate support assembly is provided with minimum software control and hardware requirement and includes a heating element comprised of multiple heating elements sections. The heating element is connected to a power source for adjusting the temperature outputs of the multiple heating element sections and providing adjustable multi-heating zones and desired temperature distribution over the substrate support surface of the substrate support assembly within a process chamber.
(FR)L'invention concerne des procédés et des systèmes de traitement de substrat pour commander l'efficacité de chauffage de substrat et générer un profil de température souhaitée sur la surface d'un substrat lorsque le substrat est disposé sur une surface de support de substrat d'un ensemble support de substrat. L'ensemble support de substrat répond aux exigences minimum en termes de matériel et de commande de logiciel et comprend un élément chauffant constitué de multiples sections d'éléments chauffants. L'élément chauffant est connecté à une source d'alimentation pour ajuster les sorties de température des multiples sections d'éléments chauffants et fournir plusieurs zones de chauffage ajustables et assurer une distribution de température souhaitée sur la surface de support de substrat de l'ensemble support de substrat dans une chambre de traitement.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)