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1. (WO2013162642) TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP

Pub. No.:    WO/2013/162642    International Application No.:    PCT/US2012/060194
Publication Date: Fri Nov 01 00:59:59 CET 2013 International Filing Date: Tue Oct 16 01:59:59 CEST 2012
IPC: H05H 1/46
H03H 7/40
H03L 7/08
Applicants: APPLIED MATERIALS, INC.
KOBAYASHI, Satoru
WONG, Lawrence
LIU, Jonathan
YANG, Yang
RAMASWAMY, Kartik
RAUF, Shahid
NEVIL, Shane, C.
BERA, Kallol
COLLINS, Kenneth, S.
Inventors: KOBAYASHI, Satoru
WONG, Lawrence
LIU, Jonathan
YANG, Yang
RAMASWAMY, Kartik
RAUF, Shahid
NEVIL, Shane, C.
BERA, Kallol
COLLINS, Kenneth, S.
Title: TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP
Abstract:
Plasma distribution is controlled in a plasma reactor by controlling the phase difference between opposing RF electrodes,, in accordance with a desired or user-selected phase difference, by a phase-lock feedback control loop.