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1. (WO2013161912) DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

Pub. No.:    WO/2013/161912    International Application No.:    PCT/JP2013/062139
Publication Date: Fri Nov 01 00:59:59 CET 2013 International Filing Date: Thu Apr 25 01:59:59 CEST 2013
IPC: G01N 21/956
G01B 11/30
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: HONDA Toshifumi
本田 敏文
URANO Yuta
浦野 雄太
JINGU Takahiro
神宮 孝広
HAMAMATSU Akira
浜松 玲
Title: DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
Abstract:
To detect an infinitesimal defect, highly precisely measure the dimensions of the detected defect, non-destructively inspect a sample, allow obtaining a substantially constant inspection result relating to the quantity, locations, dimensions, and types of the detected defects, and allow inspecting multiple samples within a constant time, a defect inspection device is configured to comprise: a projection means for projecting an illumination light in a linear region in a surface of a sample; a detection means for detecting a reflected/scattered light from the linear region whereupon the light is projected upon the sample by the projection means; and a signal processing means for processing a signal which is obtained by detecting the reflected/scattered light and detecting a defect upon the sample. The detection means further comprises: an optical assembly which diffuses the reflected/scattered light from the sample in one direction and forms an image in a direction which is orthogonal to the one direction; and a detection assembly having an array sensor in which detection pixels are positioned two-dimensionally, which detects the reflected/scattered light which is diffused in the one direction and image formed in the direction which is orthogonal to the one direction by the optical assembly, adds output signals of each of the detection pixels which are aligned in the direction in which the reflected/scattered light is diffused, and outputs same.