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1. (WO2013161772) FILM-FORMING METHOD AND FILM-FORMING DEVICE

Pub. No.:    WO/2013/161772    International Application No.:    PCT/JP2013/061810
Publication Date: Fri Nov 01 00:59:59 CET 2013 International Filing Date: Tue Apr 23 01:59:59 CEST 2013
IPC: H01L 21/312
C23C 16/455
H01L 21/768
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
Inventors: SUGITA, Kippei
杉田 吉平
HASHIMOTO, Hiroyuki
橋本 浩幸
HARADA, Muneo
原田 宗生
Title: FILM-FORMING METHOD AND FILM-FORMING DEVICE
Abstract:
A film-forming method of the present invention involves the following: supplying a first raw gas material composed of an acid anhydride and a second raw gas material composed of a diamine into an evacuated treatment vessel which holds a body to be treated; forming an insulating film composed of a polymer thin-film on the surface of the body to be treated; stopping the supply of the second raw gas material to the treatment vessel and continuing to supply the first raw gas material into the treatment vessel; and imparting a barrier function to the insulating film by reforming the insulating film. DRAWING: FIG. 4: S1 First step [Formation of polyimide film] (synchronous supply of PMDA and ODA) S2 Second step [Reforming treatment] (supply of PMDA) AA Film-forming method BB End