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Machine translation
1. (WO2013160138) BEAM GUIDING OPTICAL UNIT FOR A MULTI-BEAM SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/160138    International Application No.:    PCT/EP2013/057824
Publication Date: 31.10.2013 International Filing Date: 15.04.2013
IPC:
G02B 26/08 (2006.01)
Applicants: CARL ZEISS SMT GMBH [DE/DE]; Rudolf-Eber-Strasse 2 73447 Oberkochen (DE)
Inventors: VÖLCKER, Martin; (DE).
FELDMANN, Heiko; (DE).
HILLERICH, Bernd; (DE)
Agent: RAU, SCHNECK & HÜBNER; Königstrasse 2 90402 Nürnberg (DE)
Priority Data:
10 2012 206 609.8 23.04.2012 DE
61/636,816 23.04.2012 US
Title (DE) STRAHLFÜHRUNGSOPTIK FÜR EIN VIELSTRAHLSYSTEM
(EN) BEAM GUIDING OPTICAL UNIT FOR A MULTI-BEAM SYSTEM
(FR) OPTIQUE DE POSITIONNEMENT DE FAISCEAU POUR UN SYSTÈME MULTIFAISCEAU
Abstract: front page image
(DE)Ein optisches Vielstrahlsystem (1; 125) zur Bearbeitung und/oder Untersuchung einer Oberfläche (8; 126) umfasst ein Bauelement (52) mit einer Vielzahl von verlagerbaren Spiegel-Elementen (27), mittels welcher unterschiedliche Strahlen (135i) in unterschiedliche Foki (136i) auf die Oberfläche (6; 126) fokussierbar sind.
(EN)The invention relates to an optical multi-beam system (1; 125) for processing and/or examining a surface (8; 126), comprising a component (52) with a plurality of displaceable mirror elements (27), by means of which different beams (135i) can be focused onto the surface (6; 126) into different foci (136i).
(FR)L'invention concerne un système optique multifaisceau (1; 125) pour le traitement et/ou l'examen d'une surface (8; 126). Ledit système comprend un composant (52) doté d'une multitude d'éléments miroirs (27) déplaçables, au moyen desquels différents faisceaux (135i) peuvent être focalisés en différents foyers (136i) sur la surface (6; 126).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: German (DE)
Filing Language: German (DE)