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1. (WO2013160026) ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/160026    International Application No.:    PCT/EP2013/055662
Publication Date: 31.10.2013 International Filing Date: 19.03.2013
IPC:
G03F 7/20 (2006.01)
Applicants: ASML NETHERLANDS B.V. [NL/NL]; De Run 6501 NL-5504 DR Veldhoven (NL)
Inventors: WILKLOW, Ronald; (NL).
SCHMITZ, Roger; (NL).
NOTENBOOM, Arnoud; (NL).
WILL, Manon, Elise; (NL)
Agent: SLENDERS, Peter; P.O. Box 324 NL-5500 AH Veldhoven (NL)
Priority Data:
61/636,988 23.04.2012 US
Title (EN) ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD
(FR) PINCE ÉLECTROSTATIQUE, APPAREIL LITHOGRAPHIQUE ET PROCÉDÉ
Abstract: front page image
(EN)An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive material located on the electrode, and a dielectric portion (22) formed from a dielectric material located on the resistive portion.
(FR)La présente invention concerne une pince électrostatique conçue pour tenir un objet, la pince électrostatique comprenant une électrode, une partie résistive formée à partir d'un matériau résistif situé sur l'électrode, et une partie diélectrique formée à partir d'un matériau diélectrique situé sur la partie résistive.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)