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1. (WO2013159928) METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT

Pub. No.:    WO/2013/159928    International Application No.:    PCT/EP2013/001244
Publication Date: Fri Nov 01 00:59:59 CET 2013 International Filing Date: Fri Apr 26 01:59:59 CEST 2013
IPC: G21K 1/06
Applicants: CARL ZEISS LASER OPTICS GMBH
Inventors: EHRLER, Oli
MEIER, Uwe
UHL, Alexander
KIEREY, Holger
Title: METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT
Abstract:
The invention relates to a method for repairing a collector for an EUV projection exposure apparatus having a first coating 24 and a second coating 21, wherein the first coating 24 is arranged between the second coating 21 and a surface of the collector, comprising the following method steps: - ' completely or partly removing the first coating (24) by treatment with a first chemical solution (30); applying a new first coating (24'). According to the invention, the first chemical solution 30 used is an agent which has a first etching rate in combination with the material 22, 23 of the first coating 24 and a second etching rate in combination with the material of the second coating 21, wherein the first etching rate is greater than the second etching rate at least by a factor of 5. The invention furthermore relates to a collector for an EUV projection exposure apparatus having a first coating 24, which comprises a metal, a metal oxide, a semiconductor oxide, a semiconductor nitride or a combination thereof, and having a second coating 21, which comprises a plurality of alternately deposited plies of molybdenum and silicon, wherein the first coating 24 is arranged between the second coating 21 and a surface of the collector.