WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2013159062) TEMPERATURE CALIBRATION AND CONTROL FOR SEMICONDUCTOR REACTORS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/159062    International Application No.:    PCT/US2013/037481
Publication Date: 24.10.2013 International Filing Date: 19.04.2013
IPC:
H01L 21/205 (2006.01), H01L 21/324 (2006.01), H01L 21/66 (2006.01)
Applicants: SOLEXEL, INC. [US/US]; 1530 McCarthy Blvd Milpitas, CA 95035 (US)
Inventors: ASHJAEE, Jay; (US).
KRAMER, Karl-josef; (US).
MOSLEHI, Mehrdad, M.; (US)
Agent: WOOD, John Ryan, C.; Solexel, Inc. 1530 McCarthy Blvd Milpitas, CA 95035 (US)
Priority Data:
61/635,824 19.04.2012 US
Title (EN) TEMPERATURE CALIBRATION AND CONTROL FOR SEMICONDUCTOR REACTORS
(FR) ÉTALONNAGE ET RÉGULATION DE TEMPÉRATURE POUR DES RÉACTEURS SEMI-CONDUCTEURS
Abstract: front page image
(EN)Non-contact and noft-invasive temperature measurement structures and methods for thermal processing systems which neither damage nor contaminate the thermal processing environment are provided.
(FR)L'invention concerne des structures et des procédés de mesure de température sans contact et non invasifs pour des systèmes de traitement thermique qui n'endommagent ni ne contaminent l'environnement de traitement thermique.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)