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1. (WO2013158526) SYSTEM FOR DELIVERY OF PURIFIED MULTIPLE PHASES OF CARBON DIOXIDE TO A PROCESS TOOL
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/158526    International Application No.:    PCT/US2013/036547
Publication Date: 24.10.2013 International Filing Date: 15.04.2013
IPC:
H01L 21/302 (2006.01), H01L 21/02 (2006.01)
Applicants: PRAXAIR TECHNOLOGY, INC. [US/US]; 39 Old Ridgebury Road Danbury, CT 06810 (US)
Inventors: BANERJEE, Souvik; (US).
GERRISTEAD, William, R.; (US)
Agent: DALAL, Nilay, S.; Praxair, Inc. 39 Old Ridgebury Road Danbury, CT 06810 (US)
Priority Data:
61/625,265 17.04.2012 US
Title (EN) SYSTEM FOR DELIVERY OF PURIFIED MULTIPLE PHASES OF CARBON DIOXIDE TO A PROCESS TOOL
(FR) SYSTÈME DE DISTRIBUTION DE MULTIPLES PHASES PURIFIÉES DE DIOXYDE DE CARBONE À UN OUTIL DE TRAITEMENT
Abstract: front page image
(EN)A carbon dioxide supply method and system for supplying supercritical and subcritical phases of carbon dioxide on-demand to a substrate to create a novel and improved cleaning sequence for removal of contaminants contained in the substrate. The ability for the supply system to deliver vapor, liquid and supercritical phases of carbon dioxide in a specific sequence at predetermined times during a process cleaning sequence produces an improved removal of contaminants from the substrate compared to conventional carbon dioxide cleaning processes.
(FR)L'invention concerne un procédé et un système d'amenée de dioxyde de carbone à des phases supercritiques et sous-critiques de dioxyde de carbone, à la demande, à un substrat pour créer une nouvelle séquence de nettoyage améliorée permettant d'éliminer les contaminants contenus dans le substrat. La capacité du système d'amenée à délivrer des phases vapeur, liquide et supercritique de dioxyde de carbone au cours d'une séquence spécifique à des moments prédéterminés pendant une séquence de nettoyage du processus permet d'améliorer l'élimination des contaminants du substrat en comparaison des processus de nettoyage classiques de dioxyde de carbone.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)