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1. (WO2013158526) SYSTEM FOR DELIVERY OF PURIFIED MULTIPLE PHASES OF CARBON DIOXIDE TO A PROCESS TOOL

Pub. No.:    WO/2013/158526    International Application No.:    PCT/US2013/036547
Publication Date: Fri Oct 25 01:59:59 CEST 2013 International Filing Date: Tue Apr 16 01:59:59 CEST 2013
IPC: H01L 21/302
H01L 21/02
Applicants: PRAXAIR TECHNOLOGY, INC.
Inventors: BANERJEE, Souvik
GERRISTEAD, William, R.
Title: SYSTEM FOR DELIVERY OF PURIFIED MULTIPLE PHASES OF CARBON DIOXIDE TO A PROCESS TOOL
Abstract:
A carbon dioxide supply method and system for supplying supercritical and subcritical phases of carbon dioxide on-demand to a substrate to create a novel and improved cleaning sequence for removal of contaminants contained in the substrate. The ability for the supply system to deliver vapor, liquid and supercritical phases of carbon dioxide in a specific sequence at predetermined times during a process cleaning sequence produces an improved removal of contaminants from the substrate compared to conventional carbon dioxide cleaning processes.