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1. (WO2013156323) INSPECTION ARRANGEMENT

Pub. No.:    WO/2013/156323    International Application No.:    PCT/EP2013/057180
Publication Date: Fri Oct 25 01:59:59 CEST 2013 International Filing Date: Sat Apr 06 01:59:59 CEST 2013
IPC: G01N 21/95
Applicants: HSEB DRESDEN GMBH
Inventors: SROCKA, Bernd
LANGHANS, Ralf
Title: INSPECTION ARRANGEMENT
Abstract:
The invention relates to an arrangement for analysing an at least partially reflective surface of a wafer or other objects, containing a holder for holding the object; an inspection arrangement arranged at a distance in the region in front of the surface to be analysed; and a measurement arrangement for determining the distance and/or inclination of the surface for the inspection arrangement; characterised by a radiation source, the radiation of which is directed towards the surface to be analysed at an angle; and a spatially resolving detector for receiving the radiation from the radiation source that is reflected from the surface to be analysed, wherein the radiation source and the detector are arranged outside the region necessary for the inspection between the inspection arrangement and the surface to be analysed.