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1. (WO2013156236) SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/156236 International Application No.: PCT/EP2013/055597
Publication Date: 24.10.2013 International Filing Date: 19.03.2013
IPC:
G03F 7/20 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants: ASML NETHERLANDS B.V.[NL/NL]; P.O. Box 324 NL-5500 AH Veldhoven, NL
Inventors: LAFARRE, Raymond; NL
DZIOMKINA, Nina; NL
KARADE, Yogesh; NL
RODENBURG, Elisabeth; NL
SINGH, Harmeet; US
Agent: CORCORAN, Gregory; PO Box 324 The Netherlands NL-5500 AH Veldhoven, NL
Priority Data:
61/635,75419.04.2012US
Title (EN) SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
(FR) SUPPORT DE SUBSTRAT, APPAREIL LITHOGRAPHIQUE ET PROCÉDÉ DE FABRICATION DE DISPOSITIF
Abstract:
(EN) A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body (100) having a surface (107); a plurality of burls (106) projecting from the surface and having end surfaces to support a substrate; and a thin film stack (200) on the main body surface and forming an electric component, the thin film stack having a conductive layer (108) configured to distribute electrical charge substantially uniformly throughout a plane of the stack in which the conductive layer is positioned.
(FR) L'invention concerne un support de substrat utilisé dans un appareil lithographique comprenant : un corps principal (100) doté d'une surface (107) ; une pluralité de protubérances (106) faisant saillie à partir de la surface et présentant des surfaces d'extrémité pour supporter un substrat ; et un empilement de films minces (200) sur la surface du corps principal formant un composant électrique, l'empilement de films minces étant une couche conductrice (108) conçue pour distribuer une charge électrique sensiblement uniforme d'un bout à l'autre d'un plan de l'empilement dans lequel la couche conductrice est positionnée.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)