Search International and National Patent Collections

1. (WO2013156086) ADAPTIVE PATTERN GENERATION

Pub. No.:    WO/2013/156086    International Application No.:    PCT/EP2012/057316
Publication Date: Fri Oct 25 01:59:59 CEST 2013 International Filing Date: Sat Apr 21 01:59:59 CEST 2012
IPC: G03F 7/20
Applicants: Hewlett-Packard Development Company, L.P.
RUDIN, John Christopher
Inventors: RUDIN, John Christopher
Title: ADAPTIVE PATTERN GENERATION
Abstract:
Embodiments of the present invention provide systems and method for adaptively generating a pattern (12) for fabricating semiconductor devices, the method comprising obtaining image data of a surface (2), and dynamically modifying a pattern to be applied to the surface based on the obtained image data.