Processing

Please wait...

Settings

Settings

Goto Application

1. WO2013155805 - NEAR-NULL COMPENSATOR, SURFACE SHAPE MEASURING INSTRUMENT AND MEASURING METHOD FOR STITCHING MEASUREMENT OF ASPHERIC SURFACES SUB-APERTURES

Publication Number WO/2013/155805
Publication Date 24.10.2013
International Application No. PCT/CN2012/078965
International Filing Date 20.07.2012
IPC
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01M 11/02 2006.01
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
02Testing optical properties
G01B 9/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
CPC
G01B 9/02039
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02034characterised by particularly shaped beams or wavefronts
02038Shaping the wavefront, e.g. generating a spherical wavefront
02039by matching the wavefront with a particular object surface shape
G01B 9/02058
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
02056Passive error reduction, i.e. not varying during measurement, e.g. by constructional details of optics
02058by particular optical compensation or alignment elements, e.g. dispersion compensation
G01B 9/02085
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02083characterised by particular signal processing and presentation
02085Combining two or more images of different regions
G01B 9/021
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
021using holographic techniques
G01M 11/025
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
02Testing optical properties
0242by measuring geometrical properties or aberrations
025by determining the shape of the object to be tested
G01M 11/0271
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
02Testing optical properties
0242by measuring geometrical properties or aberrations
0271by using interferometric methods
Applicants
  • 中国人民解放军国防科学技术大学 NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY [CN]/[CN] (AllExceptUS)
  • 陈善勇 CHEN, Shanyong [CN]/[CN] (UsOnly)
  • 戴一帆 DAI, Yifan [CN]/[CN] (UsOnly)
  • 李圣怡 LI, Shengyi [CN]/[CN] (UsOnly)
  • 彭小强 PENG, Xiaoqiang [CN]/[CN] (UsOnly)
  • 谢超 XIE, Chao [CN]/[CN] (UsOnly)
  • 彭扬林 PENG, Yanglin [CN]/[CN] (UsOnly)
Inventors
  • 陈善勇 CHEN, Shanyong
  • 戴一帆 DAI, Yifan
  • 李圣怡 LI, Shengyi
  • 彭小强 PENG, Xiaoqiang
  • 谢超 XIE, Chao
  • 彭扬林 PENG, Yanglin
Agents
  • 湖南兆弘专利事务所 HUNAN ZHAOHONG PATENT LAW OFFICE
Priority Data
201210110946.416.04.2012CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) NEAR-NULL COMPENSATOR, SURFACE SHAPE MEASURING INSTRUMENT AND MEASURING METHOD FOR STITCHING MEASUREMENT OF ASPHERIC SURFACES SUB-APERTURES
(FR) COMPENSATEUR QUASI-NUL, INSTRUMENT DE MESURE DE LA FORME D'UNE SURFACE ET PROCÉDÉ DE MESURE PERMETTANT DE RELIER LES MESURES DE SOUS-OUVERTURES DE SURFACES ASPHÉRIQUES
(ZH) 用于非球面子孔径拼接测量的近零位补偿器及面形测量仪和测量方法
Abstract
(EN)
A near-null compensator for stitching measurement of aspheric surface sub-apertures mainly consists of a pair of CGH (computer-generated hologram) phase plates rotatable in opposite directions, the phase function of the phase plates consists of Z5 term and Z7 term of Zemike polynomial, the coefficients of Z5 and Z7 polynomials of the two phase plates are opposite numbers, and values of the coefficients are determined by the aberrations of off-axis sub-apertures; the phase plates are mounted on a pair of hollow precise turntables rotatable in opposite directions, and the optical axes of the phase plates are coincident with the rotation axes of the hollow precise turntables. The present invention further provides a surface shape measuring instrument for stitching measurement of aspheric surface sub-apertures comprising the near-null compensator. In addition, a method for stitching measurement of aspheric surface sub-apertures using the surface shape measuring instrument is also provided. The present invention has the advantages of simplified structure, compact space, low cost, high precision and adaptability, and the like.
(FR)
La présente invention concerne un compensateur quasi-nul permettant de relier les mesures de sous-ouvertures d'une surface asphérique, le compensateur étant principalement constitué d'une paire de plaques de phase CGH (hologramme généré par ordinateur) pouvant tourner dans des directions opposées, la fonction de phase des plaques de phase étant constituée du terme Z5 et du terme Z7 de la polynomiale de Zemike, les coefficients des polynomiales Z5 et Z7 des deux plaques de phase étant des nombres opposés, et les valeurs des coefficients étant déterminées par les aberrations des sous-ouvertures hors axe. Les plaques de phase sont montées sur une paire de tables tournantes précises creuses pouvant tourner dans des directions opposées, et les axes optiques des plaques de phase coïncident avec les axes de rotation des tables tournantes précises creuses. La présente invention concerne en outre un instrument de mesure de la forme d'une surface permettant de relier les mesures de sous-ouvertures d'une surface asphérique, l'instrument comprenant le compensateur quasi-nul. En outre, l'invention concerne un procédé permettant de relier les mesures de sous-ouvertures d'une surface asphérique au moyen de l'instrument de mesure de la forme d'une surface. La présente invention possède une structure simple et est compacte, peu coûteuse, très précise et très adaptable, entre autres.
(ZH)
一种用于非球面子孔径拼接测量的近零位补偿器,主要由一对相向回转的计算机生成全息相位板组成,所述相位板的相位函数由Zemike多项式的Z5和Z7两项组成,两个所述相位板的Z5和Z7多项式系数互为相反数,且取值大小由离轴子孔径的像差确定;所述相位板安装在一对相向回转的中空精密转台上,且所述相位板的光轴与所述中空精密转台的回转轴线重合。本发明还提供了一种用于非球面子孔径拼接测量的面形测量仪,其包括所述近零位补偿器。另外,本发明还提供了一种用所述面形测量仪对非球面子孔径进行拼接测量的方法。本发明具有结构简化、空间紧凑、低成本、高精度、适应性强等优点。
Also published as
Latest bibliographic data on file with the International Bureau