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1. (WO2013155399) INDEXING OPTICS FOR AN ACTINIC EXTREME ULTRA-VIOLET (EUV) RETICLE INSPECTION TOOL
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/155399 International Application No.: PCT/US2013/036349
Publication Date: 17.10.2013 International Filing Date: 12.04.2013
IPC:
G01N 21/15 (2006.01) ,G01N 21/88 (2006.01) ,G01N 21/33 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
01
Arrangements or apparatus for facilitating the optical investigation
15
Preventing contamination of the components of the optical system or obstruction of the light path
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
33
using ultra-violet light
Applicants:
KLA-TENCOR CORPORATION [US/US]; Legal Department One Technology Drive Milpitas, California 95035, US
Inventors:
DELGADO, Gildardo; US
CHILESE, Frank; US
Agent:
MCANDREWS, Kevin; Kla Tencor Corporation Legal Department One Technology Drive Milpitas, California 95035, US
Priority Data:
13/860,37710.04.2013US
61/623,56413.04.2012US
Title (EN) INDEXING OPTICS FOR AN ACTINIC EXTREME ULTRA-VIOLET (EUV) RETICLE INSPECTION TOOL
(FR) INDEXATION D'UN SYSTÈME OPTIQUE POUR OUTIL DE VÉRIFICATION D'UN MASQUE EUV ACTINIQUE
Abstract:
(EN) A method for reducing damage and contamination to an optical element in an extreme ultra-violet (EUV) reticle inspection system, including, presenting an illumination source to a reticle inspection system, and displacing the optical element in the path of the illumination source from a first portion to a second portion, wherein the first portion is damaged and the second portion is not damaged, and the optical element has a plurality of portions.
(FR) La présente invention concerne un procédé de réduction des dommages et de la contamination dont peut faire l'objet un élément optique dans un système de vérification des masques EUV (ultra-violet extrême). Ledit procédé comprend les étapes consistant à présenter une source de lumière devant un système de vérification de masques et à déplacer l'élément optique sur le trajet de la source de lumière depuis une première partie et jusqu'à une deuxième partie, la première partie étant endommagée et la deuxième partie ne l'étant pas, et ledit élément optique comprenant une pluralité de parties.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)