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1. (WO2013155008) VARIABLE POLARIZATION WAFER INSPECTION
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2013/155008 International Application No.: PCT/US2013/035660
Publication Date: 17.10.2013 International Filing Date: 08.04.2013
IPC:
H01L 21/66 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66
Testing or measuring during manufacture or treatment
Applicants:
KLA-TENCOR CORPORATION [US/US]; Legal Department One Technology Drive Milpitas, California 95035, US
Inventors:
PENG, Xianzhao; US
WANG, Mark Shi; US
CHEN, Grace Hsiu-Ling; US
Agent:
MCANDREWS, Kevin; KLA-Tencor Corporation Legal Department One Technology Drive Milpitas, CA 95035, US
Priority Data:
13/857,74405.04.2013US
61/621,71509.04.2012US
Title (EN) VARIABLE POLARIZATION WAFER INSPECTION
(FR) INSPECTION DE TRANCHE À POLARISATION VARIABLE
Abstract:
(EN) Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).
(FR) L'invention concerne des procédés et des systèmes qui permettent d'inspecter des tranches à polarisation variable. Un système comprend un ou plusieurs composants de polarisation positionnés dans un ou plusieurs trajets de lumière diffusée à partir d'une tranche et détectée par un ou plusieurs canaux d'un système d'inspection. Le ou les composants de polarisation sont configurés pour avoir une ou plusieurs polarisations qui sont choisies parmi au moins deux paramètres de polarisation pour le ou les composants de polarisation.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)