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1. (WO2013154536) INTERCHAMBER ADAPTER FOR CLUSTER TOOL

Pub. No.:    WO/2013/154536    International Application No.:    PCT/US2012/032879
Publication Date: Fri Oct 18 01:59:59 CEST 2013 International Filing Date: Wed Apr 11 01:59:59 CEST 2012
IPC: H01L 21/67
H01L 21/677
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
KURITA, Shinichi
INAGAWA, Makoto
KHO, Jeffrey A.
TINER, Robin L.
ANWAR, Suhail
Inventors: KURITA, Shinichi
INAGAWA, Makoto
KHO, Jeffrey A.
TINER, Robin L.
ANWAR, Suhail
Title: INTERCHAMBER ADAPTER FOR CLUSTER TOOL
Abstract:
A serial cluster tool system is provided. The system includes a first cluster tool having a first plurality of processing chambers and at least one first peripheral chamber, a second cluster tool having a second plurality of processing chambers and at least one second peripheral chamber, and an interchamber adapter device coupling the at least one first peripheral chamber to the at least one second peripheral chamber, the interchamber adapter device comprising a vacuum-proof flexible section coupled between sealing faces of the first chamber and the second chamber.