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1. (WO2013154067) INSPECTION DEVICE AND IMAGE CAPTURE ELEMENT

Pub. No.:    WO/2013/154067    International Application No.:    PCT/JP2013/060600
Publication Date: Fri Oct 18 01:59:59 CEST 2013 International Filing Date: Tue Apr 09 01:59:59 CEST 2013
IPC: G01N 21/956
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: JINGU Takahiro
神宮 孝広
Title: INSPECTION DEVICE AND IMAGE CAPTURE ELEMENT
Abstract:
Each sensor pixel of an image capture element, which is configured by arraying a plurality of sensor pixels in a prescribed direction, is inclined with respect to a pass-through direction of a defect image in which, among a plurality of sensor pixel boundary sides which form an outer edge part of the sensor pixel, at least one of a pair of sensor pixel boundary sides which are mutually opposing in the array direction is perpendicular to a prescribed direction. It is thus possible to provide an inspection device with which highly sensitive inspection and/or improvement of reproducibility of defect detection is effected.