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1. (WO2013149961) PARTICULATE CONTAMINATION MEASUREMENT METHOD AND APPARATUS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2013/149961 International Application No.: PCT/EP2013/056794
Publication Date: 10.10.2013 International Filing Date: 28.03.2013
IPC:
G03F 7/20 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 NL-5500 AH Veldhoven, NL
TNO [NL/NL]; Schoemakerstraat 97 NL-2628 VK Delft, NL
Inventors:
DE JONG, Anthonius; NL
VAN DER DONCK, Jacques; NL
Agent:
SLENDERS, Peter; P.O. Box 324 NL-5500 AH Veldhoven, NL
Priority Data:
61/619,20902.04.2012US
Title (EN) PARTICULATE CONTAMINATION MEASUREMENT METHOD AND APPARATUS
(FR) PROCÉDÉ ET APPAREIL DE MESURE DE CONTAMINATION DE MATIÈRE PARTICULAIRE
Abstract:
(EN) A particulate contamination measurement method and apparatus are discussed. The method, for example, comprises pressing a measurement surface (5) of a polyurethane elastomer (2) against a surface (7) to be measured, removing the polyurethane elastomer from the surface without leaving residues, then using an optical apparatus (11) to detect particles (8) which have been removed by the polyurethane elastomer from the surface and which have become attached to the polyurethane elastomer.
(FR) La présente invention porte sur un procédé et un appareil de mesure de contamination de matière particulaire. Le procédé, par exemple, comprend le pressage d'une surface de mesure (5) d'un élastomère de polyuréthane (2) contre une surface (7) à mesurer, le retrait de l'élastomère de polyuréthane de la surface sans laisser de résidus, puis l'utilisation d'un appareil optique (11) pour détecter des particules (8) qui ont été retirées par l'élastomère de polyuréthane de la surface et qui sont devenues attachées à l'élastomère de polyuréthane.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP2834709US20150055127KR1020150013483CN104204954JP6282260JP2015517101