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1. WO2013148410 - COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS

Publication Number WO/2013/148410
Publication Date 03.10.2013
International Application No. PCT/US2013/032920
International Filing Date 19.03.2013
IPC
C01B 13/11 2006.1
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
13Oxygen; Ozone; Oxides or hydroxides in general
10Preparation of ozone
11by electric discharge
H02M 7/537 2006.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
7Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
42Conversion of dc power input into ac power output without possibility of reversal
44by static converters
48using discharge tubes with control electrode or semiconductor devices with control electrode
53using devices of a triode or transistor type requiring continuous application of a control signal
537using semiconductor devices only, e.g. single switched pulse inverters
H02M 3/335 2006.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
3Conversion of dc power input into dc power output
22with intermediate conversion into ac
24by static converters
28using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
325using devices of a triode or a transistor type requiring continuous application of a control signal
335using semiconductor devices only
H02M 1/36 2007.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
1Details of apparatus for conversion
36Means for starting or stopping converters
H02M 7/48 2007.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
7Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
42Conversion of dc power input into ac power output without possibility of reversal
44by static converters
48using discharge tubes with control electrode or semiconductor devices with control electrode
H02M 7/538 2007.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
7Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
42Conversion of dc power input into ac power output without possibility of reversal
44by static converters
48using discharge tubes with control electrode or semiconductor devices with control electrode
53using devices of a triode or transistor type requiring continuous application of a control signal
537using semiconductor devices only, e.g. single switched pulse inverters
538in a push-pull configuration
CPC
C01B 13/11
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
13Oxygen; Ozone; Oxides or hydroxides in general
10Preparation of ozone
11by electric discharge
C01B 13/115
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
13Oxygen; Ozone; Oxides or hydroxides in general
10Preparation of ozone
11by electric discharge
115characterised by the electrical circuits producing the electrical discharge
C01B 2201/90
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
2201Preparation of ozone by electrical discharge
90Control of the process
H01J 37/248
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
248Components associated with high voltage supply
H02H 9/02
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
HEMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
9Emergency protective circuit arrangements for limiting excess current or voltage without disconnection
02responsive to excess current
H02M 1/0025
Applicants
  • MKS INSTRUMENTS, INC. [US]/[US]
Inventors
  • TRAN, Ken
  • TIAN, Feng
  • CHEN, Xing
  • LEE, Franklin
Agents
  • MARAIA, Joseph, M.
Priority Data
13/432,41528.03.2012US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS
(FR) ALIMENTATION ÉLECTRIQUE COMPACTE CONFIGURABLE POUR EXCITER DES CELLULES DE PRODUCTION D'OZONE
Abstract
(EN) Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high- voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
(FR) L'invention concerne des perfectionnements à l'alimentation d'énergie électrique à haute fréquence pour des cellules de production d'ozone, qui peut être accomplie en utilisant les systèmes et techniques décrits ici. L'application d'un convertisseur continu-continu fonctionnant à une fréquence de commutation sensiblement supérieure à une fréquence de charge supporte la production d'un courant alternatif à haute tension pour l'alimentation de telles cellules, tout en permettant des réductions de taille de composant et des réductions d'un facteur de qualité d'un circuit d'ajustement de charge. Des onduleurs électriques réglable utilisés pour obtenir une ou plusieurs des fréquences de commutation et de charge peuvent être réglés en utilisant des techniques de rétroaction pour fournir une énergie stable et de haute qualité à des cellules de production d'ozone sous des variations d'une ou plusieurs conditions de puissance et de charge alimentées extérieurement. Un circuit de protection d'entrée peut être également fourni pour introduire de manière sélective une résistance de limitation de courant jusqu'à ce qu'un bus continu d'entrée ait été suffisamment initialisé comme déterminé par des mesures obtenues à partir du bus continu. La résistance de limitation de courant peut être un thermistor à coefficient de température positive.
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