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1. (WO2013148396) METHODS AND APPARATUS FOR GENERATING AND DELIVERING A PROCESS GAS FOR PROCESSING A SUBSTRATE

Pub. No.:    WO/2013/148396    International Application No.:    PCT/US2013/032791
Publication Date: Fri Oct 04 01:59:59 CEST 2013 International Filing Date: Tue Mar 19 00:59:59 CET 2013
IPC: H01L 21/205
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
Inventors: SANCHEZ, Errol Antonio C.
CARLSON, David K.
Title: METHODS AND APPARATUS FOR GENERATING AND DELIVERING A PROCESS GAS FOR PROCESSING A SUBSTRATE
Abstract:
Methods and apparatus for generating and delivering process gases for processing substrates are provided herein. In some embodiments, an apparatus for processing a substrate may include a container comprising a lid, a bottom, and a sidewall, wherein the lid, the bottom, and the sidewall define an open area; a solid precursor collection tray disposed within the open area; a gas delivery tube disposed within the open area and extending toward the solid precursor collection tray to provide a gas proximate the solid precursor collection tray; and a purge flow conduit coupled to the open area.