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1. (WO2013148287) HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION

Pub. No.:    WO/2013/148287    International Application No.:    PCT/US2013/031755
Publication Date: Fri Oct 04 01:59:59 CEST 2013 International Filing Date: Fri Mar 15 00:59:59 CET 2013
IPC: H01L 21/265
H01J 37/317
H01J 37/153
H01J 37/12
Applicants: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
Inventors: CHANG, Shengwu
Title: HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
Abstract:
A hybrid electrostatic lens is used to shape and focus an ion beam. The hybrid electrostatic lens comprises an Einzel lens defined by an elongated tube having a first and second ends and a first electrode disposed at the first end and a second electrode disposed at the second end. The elongated tube is configured to receive a voltage bias to create an electric field within the Einzel lens as the ion beam travels through the hybrid electrostatic lens. The hybrid electrostatic lens further includes a quadrupole lens having a first stage and a second stage, where each of the stages is defined by a plurality of electrodes turned 90 with respect to each other to define a pathway in the Z direction through the elongated tube. The Einzel lens focuses the ion beam and the quadrupole lens shapes the ion beam.