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1. (WO2013148203) MODEL OPTIMIZATION APPROACH BASED ON SPECTRAL SENSITIVITY
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2013/148203    International Application No.:    PCT/US2013/030907
Publication Date: 03.10.2013 International Filing Date: 13.03.2013
IPC:
G06F 19/00 (2011.01), G06F 17/50 (2006.01), G01N 21/25 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; Akasaka Biz Tower, 3-1 Akasaka 5-chome Minato-ku, Tokyo 1076325 (JP).
KLA-TENCOR CORPORATION [US/US]; One Technology Drive Milpitas, California 95035 (US)
Inventors: PANDEV, Stilian Ivanov; (US).
DZIURA, Thaddeus Gerard; (US).
SHIH, Meng-Fu; (US).
LEE, Lie-Quan; (US)
Agent: MALLIE, Michael A.; Blakely Sokoloff Taylor & Zafman LLP 1279 Oakmead Parkway Sunnyvale, California 94085 (US)
Priority Data:
61/616,971 28.03.2012 US
13/781,474 28.02.2013 US
Title (EN) MODEL OPTIMIZATION APPROACH BASED ON SPECTRAL SENSITIVITY
(FR) APPROCHE D'OPTIMISATION DE MODÈLE BASÉE SUR UNE SENSIBILITÉ SPECTRALE
Abstract: front page image
(EN)Model optimization approaches based on spectral sensitivity is described. For example, a method includes determining a first model of a structure. The first model is based on a first set of parameters. A set of spectral sensitivity variations data is determined for the structure. Spectral sensitivity is determined by derivatives of the spectra with respect to the first set of parameters. The first model of the structure is modified to provide a second model of the structure based on the set of spectral sensitivity variations data. The second model of the structure is based on a second set of parameters different from the first set of parameters. A simulated spectrum derived from the second model of the structure is then provided.
(FR)L'invention concerne des approches d'optimisation de modèle basées sur une sensibilité spectrale. Par exemple, un procédé consiste à déterminer un premier modèle d'une structure. Le premier modèle est basé sur un premier ensemble de paramètres. Un ensemble de données de variation de sensibilité spectrale est déterminé pour la structure. La sensibilité spectrale est déterminée par des dérivées des spectres relativement au premier ensemble de paramètres. Le premier modèle de la structure est modifié afin de fournir un second modèle de la structure en fonction de l'ensemble de données de variation de sensibilité spectrale. Le second modèle de la structure est basé sur un second ensemble de paramètres différent du premier ensemble de paramètres. Un spectre simulé dérivé du second modèle de la structure est ensuite fourni.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)