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1. (WO2013146406) WAVEGUIDE-COUPLED MSM-TYPE PHOTODIODE

Pub. No.:    WO/2013/146406    International Application No.:    PCT/JP2013/057622
Publication Date: Fri Oct 04 01:59:59 CEST 2013 International Filing Date: Tue Mar 19 00:59:59 CET 2013
IPC: H01L 31/108
G02B 6/42
Applicants: NEC CORPORATION
日本電気株式会社
FUJIKATA Junichi
藤方 潤一
NAKAMURA Takahiro
中村 隆宏
Inventors: FUJIKATA Junichi
藤方 潤一
NAKAMURA Takahiro
中村 隆宏
Title: WAVEGUIDE-COUPLED MSM-TYPE PHOTODIODE
Abstract:
A waveguide-coupled MSM-type photodiode of the present invention comprises a structure in which a semiconductor light-absorbing layer and an optical waveguide core layer are adjacent and optically coupled to each other, has formed metal-semiconductor-metal (MSM) junctions which are arranged at an interval on the semiconductor light-absorbing layer, and is characterized in that of the MSM electrodes arranged at the interval, a voltage is set so that a reverse bias is applied to those MSM electrodes that are arranged on a light incidence side.